Page 11 - ebook

MEMS SCANNING MIRRORS

| DESCRIPTION

MEMS scanning mirrors are consisted with a tilting mirror, torsional springs, and comb-drive actuators.
The mirror redirects incident beam toward specific direction where users want to scan the target object.
The incident beam is usually laser, but all kinds of light sources can also be used.

A-Series B-Series
| FEATURES
· Electrostatic MEMS Scanner
· Various Packaging Option
· Reflective Mirror with Torsional Springs
· Simple Fabrication Batch Process

| APPLICATIONS
· Optical Communications - VOA, WSS, TLS 2D Single 2D Single
MEMS Scanner MEMS Scanner
· Miniaturized projection displays (Gimbaled Type) (Gimbal-less Type)
· Bio imaging
- Optical Coherence Tomography C-Series S-Series
- Finger vein identification
- Handheld Skin care system
· Industrial imaging
- LCD panel inspection system
· Various scanning system

1D Single MEMS Scanner 1D Array MEMS Scanner
| SPECIFICATIONS
Series A-Series B-Series
unit
Part No. A1-C0505 A1-C0808 B1-C0808 B2-C1010**
Mirror Size Dia. 1.0 Ellipse 2.3x3.0 Dia. 2.0 Dia. 2.5 mm
Mode Quasi-Static Quasi-Static
Resonance Freq. 210 230 800 600 Hz
Axis-1
Q-S Freq. < 25 < 20 < 100 < 50 Hz
Mirror Tilt Angle ±3 @120 ±2 @120 ±5 @120 ±3 @180 deg. @Vdc
Mode Resonance Same with Axis-1
Axis-2 Resonance Freq. 1650 1800 -- -- Hz
Mirror Tilt Angle ±3 @60 ±3 @60 -- -- deg. @Vdc
Package Type CLCC + PCB CLCC + PCB COB (Default)

Series C-Series S-Series**
unit
Part No. C1-C1208 C2-uC3216 S1-AP025 S2-AP025
Sq. 0.29x1 Sq. 0.29x1
Mirror Size Dia. 4.0 Dia. 1.0 mm
for Each for Each
Mode Quasi-Static Quasi-Static
Resonance Freq. 400 600 4,000 4,000 Hz
Axis-1
Q-S Freq. <50 <50 100 100 Hz
Mirror Tilt Angle ±5 @120 ±5 @30 ±4 @100 ±2 @100 deg. @Vdc
Package Type COB TO-46 COB COB (Default)

* The specification of the product can be changed without advanced notice.
** Developing